Center Organization and Infrastructure

Currently there are 8 faculty members, 5 post-doctoral research fellows, more than 40 M.Sc. and Ph.D. students, and 26 technical personnel working in the Center. METU-MEMS Center has a microelectronics fabrication facility for 4", 6" and partially 8" wafer processing with a 1000 sq. meters of class 100 and class 1000 clean room area for fabrication and 300 sq. meters of class 10000 clean room area for electrical testing of IC's and active discrete components.
METU-MEMS Center has installed specialized utilities to maintain the ultra-clean environment required to manufacture MEMS devices and support its equipment. The process equipment include a stepper with a 0.35µm resolution, automatic photo resist coaters, DRIE, RIE, ICP RIE, PECVD, LPCVD, a contact aligner with wafer bonders, oxidation and diffusion furnaces, a vacuum probe station for wafer level probe testing, and a number of metrology equipment.