MEMS activities at METU have been started in 1995 within Electrical and Electronics Eng. Dept., and since then, a number of research projects have been conducted that are supported by various national and international institutions, including TUBITAK, State Planning Organization (DPT), MSB Ar-Ge, SSM, European Union 6th and 7th Framework Programmes, NATO SfS Programme, NSF, TOFAS, and Intel.

As a result, a considerable amount of knowledge and experience has been gained, and the first MEMS center is established in Turkey in 2008, which is called METU-MEMS Center.  In METU-MEMS Center, a wide-variety of microsensors and components has been and is being developed, including low-cost CMOS infrared detectors, accelerometers, gyroscopes, DNA analysis systems, biosensors, micro power generators, chip cooling systems, acoustic sensors, humidity sensors, temperature sensors, frost sensors, piezoresistive and capacitive pressure sensors, and various RF MEMS components.  Some of the developed prototypes show compatible performances to the best examples in the world, and efforts to commercialize these microsensors and microsystems are currently continuing.
In the past 15 years, METU-MEMS Center has collaborated with a number of national/international partners such as, IMEC (one of the largest microelectronics/MEMS center in Europe), Intel, University of Michigan at Ann Arbor, Arizona State University, Massachusetts Institute of Technology, ASELSAN, TOFAS, and ARCELIK (also known as BEKO).  With the help of these collaborations and the success of the projects, METU-MEMS Center gained a well-deserved recognition both in national and international arenas.  Based on this good reputation, the IEEE/ASME MEMS 2006 conference (the most prestigious international conference in the field) was held in Istanbul, Turkey, being the 4th country in Europe (after Germany, The Netherlands, and Switzerland) that could organize this conference.  Center has recently awarded an European Union 7th Framework Programme (EU-FP7) Regional Potentials (REGPOT) Project (METU-MEMS), which has the largest budget taken by a Turkish Participant Institution in the history of the framework programs.
Current goal of METU-MEMS Center is to be a center of excellence in MEMS field, serving to national and international research and technology for industrial development.