Power MEMS Group

Mems Based Energy Scavenging

Technical Leader: Assoc. Prof. Dr. Haluk Külah
Group Members (Alphabetical Order):

  • Arian Rahimi (M.Sc. Student)
  • Emre Tan Topal (M.Sc. Student)
  • Levent Beker (M.Sc. Student)
  • Özge Zorlu (Ph.D.)
  • Serol Türkyılmaz (M.Sc. Student)

Alumni:

  • İbrahim Sarı (Ph.D., 2008)

Research Interests:

  • Design
      • Theoretical design and optimization of MEMS based energy scavengers
      • CAD modeling of energy harvester structures
      • Analytical and Finite Element Modeling
  • Fabrication
      • Parylene Fabrication
      • Fabrication of suspended mechanical structures (beams, diaphragms)
      • Electroplating
  • Circuit Design
      • Analog and Digital Integrated Circuits
      • Low Power IC Design
      • VLSI Design
  • Software Used for Design and Analysis
      • Cadence
      • Solidworks
      • ANSYS
      • COMSOL Multiphysics
      • MATLAB
  • Testing
      • Testing of fabricated electromagnetic energy harvesters via the shaker table (Bruel & Kjaer, 4809, Vibration exciter)

Milestones
Energy harvesting research in METU has started in 2004. The goal of PowerMEMS research group is to develop MEMS-based micro energy generators to power up microsystems and microelectronic chips. In powering up these systems, energy available in the environment will be used instead of any external power supply. By this way, it will be possible to implement self-powered, long life-time, wireless microsensor arrays. An in-depth research has been conducted on energy harvesting, including following projects:
Currently, group has been developing micro energy generators for powering mobile electronic systems.

The goal of this research project is to develop MEMS-based micro energy generators to power up microsystems and microelectronic chips. In powering up these systems, energy available in the environment will be used instead of any external power supply. By this way, it will be possible to implement self-powered, long life-time, wireless microsensor arrays.

Current Projects 
MEMS-Based Energy Generators for TPMS Applications
Funding: TOFAŞ
Tire Pressure Monitoring Systems (TPMS) are being used on more and more new vehicles. Low tires are potentially dangerous. Tire pressure needs to be checked regularly because all tires lose pressure over. The goal of this research project is to develop MEMS-based micro energy generators to power up Tire Pressure Monitoring Systems.

Past Projects
MEMS-Based Energy Scavenging 
Funding: TÜBİTAK, 104E119

The goal of this research project is to develop MEMS-based micro energy generators to power up microsystems and microelectronic chips. In powering up these systems, energy available in the environment will be used instead of any external power supply. By this way, it will be possible to implement self-powered, long life-time, wireless micro sensor arrays.