METU MEMS Center has been qualified as a legal entity on 16 August 2017 within the scope of Law No. 6550 on Supporting Research Infrastructures. The accumulated knowledge, practical experience and trained workforce obtained during the course of over twenty-two years of research studies carried out in the field of MicroElectroMechanical Systems (MEMS) at the Middle East Technical University, and the ecosystem created alongside with the established spin-off companies have been the most effective factors to be qualified as a research center operating within the scope of Law no. 6550. More specifically, METU MEMS has been declared as one of the first four National Research Infrastructures to be qualified under the Law No. 6550; law for supporting research infrastructures.

In addition to scientific research activities, METU MEMS has set it mission as to transform the outputs obtained from research into products and to develop advanced technology products that will bring added value to our country. For this purpose, in the last ten years, a total of 23 patent applications were made (14 registered and 9 pending) and 6 companies (2 start-ups and 4 spin-offs) were established stemming from the research activities at the Center.

According to ISI Database, the Center created over 300 publications, which were cited more than 2000 times. In addition, over 100 graduate theses were written out of the research activities carried out within the Center.