METU MEMS has been declared as one of the National Research Infrastructures that are qualified under the Law No. 6550; law for supporting research infrastructure.

Prof. Dr. Tayfun Akın has been leading research in the field of MEMS since 1995 at METU in Turkey. In 2008, these research and development activities gained corporate identity under the name of METU MEMS Facility. As a result of the evaluation made by the Research Infrastructure Committee consist of the Ministry of Science, Industry and Technology, and the Ministry of National Education which operates under the chairmanship of the Ministry of Development, METU MEMS Center has been qualified for five years within the scope of the Law No. 6550 - Supporting Research Infrastructure.