Services fees
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SERVICES FEES
In addition to ongoing national and international projects, METU MEMS Center continues to support research and development activities carried out throughout the country by providing its qualified cleanroom infrastructure for the use of external stakeholders within the framework of fundamental principles and rules.
All individuals, institutions, and organizations who want to benefit from the facilities of the Center are defined as "External Users". External Users, who want to buy services from the Center involving the use of the Class 1000 and 10000 (testing area) cleanroom infrastructures, shall fill out the "Quotation Request Form" correctly (under the "Our Services" tab on our website) and submit for evaluation. If the demand of External Users is decided as achievable to be met by using the facilities of the Center, a quotation is prepared based on the "METU MEMS Center - Hourly Fees for Device Use" list given below. Provided that the external user has received the necessary training, they can work in the cleanroom independently, following occupational health and safety rules, under the approval and supervision of the relevant device responsible (i.e. identified owner of the device).
Related to "METU MEMS Center - Hourly Fees for Device Use";
• During the invoicing process, the actual usage is taken into account rather than the prices stated on the quotation.
• The prices listed below do not include the cost of consumables used in the devices.
• The prices listed below do not include VAT.
• The prices listed below are for standard device use only. Pricing may vary depending on additional requests (material use, design of experiment, analysis, and reporting of outputs, etc.) and/or the complexity of the request.
• The 'Hourly Wage' specified in the list is applicable only to standard applications. This price may vary for studies conducted within the scope of special production and R&D.
• The "TA 1000 (i.e., Class 1000 Cleanroom) Single Entry - Consumable Fee" in the list includes consumables such as gloves, masks, shoe covers, and wipers that everyone must use when entering.
• When External Users who use cleanroom infrastructure repeatedly and continuously are considered, fees for materials such as articles of clothing, shoes, etc., are priced once a year within the scope of the service.
• The "Cleanroom Entrance Fee" is charged on a daily basis.
| Devices and Other Cost Items | METU MEMS Center - Hourly Fees for Device Use (2023 Charges) | ||
| Other External User ($/hour) |
External Users from Other Universities and SME ($/hour)
|
Internal Projects and
|
|
| Long-Time External User - Annual Miscellaneous Expenses (Cleanroom Clothing, Shoes, etc.) - Class 1000 Cleanroom | $ 132.60 | $ 122.40 | $ 112.20 |
| Long-Time External User - Annual Miscellaneous Expenses (Cleanroom Clothing, Shoes, etc.) - Class 10000 (Test Area) Cleanroom | $ 14.30 | $ 13.20 | $ 12.10 |
| Class 1000 Cleanroom - Daily Entrance Fee | $ 15.60 | $ 14.40 | $ 13.20 |
| Class 10000 Cleanroom - Daily Entrance Fee | $ 3.25 | $ 3.00 | $ 2.75 |
| Class 1000 Cleanroom - Daily Consumables Price - Single Entrance | $ 7.80 | $ 7.20 | $ 6.60 |
| Class 10000 Cleanroom - Daily Consumables Price - Single Entrance | $ 1.63 | $ 1.50 | $ 1.38 |
| Personel - Hourly Wage | $ 39.00 | $ 36.00 | $ 33.00 |
| Photolithography | Other External User ($/hour) |
External Users from Other Universities and SME ($/hour) |
Internal Projects and External Users from METU ($/hour) |
| MANUAL SPIN COATER | $ 15.60 | $ 14.40 | $ 13.20 |
| AUTOMATIC SPIN COATER SUSS MicroTec ACS 200 | $ 110.50 | $ 102.00 | $ 93.50 |
| STEPPER ASML PAS5500 | $ 149.50 | $ 138.00 | $ 126.50 |
| MASK MAKER | $ 71.50 | $ 66.00 | $ 60.50 |
| MASK ALIGNER | $ 28.60 | $ 26.40 | $ 24.20 |
| Metallisation | Other External User ($/hour) |
External Users from Other Universities and SME ($/hour) |
Internal Projects and
|
| SPUTTER BESTEC | $ 78.00 | $ 72.00 | $ 66.00 |
| SPUTTER AJA | $ 78.00 | $ 72.00 | $ 66.00 |
| SPUTTER NANOVAK | $ 19.50 | $ 18.00 | $ 16.50 |
| THERMAL EVAPORATOR VARIAN | $ 39.00 | $ 36.00 | $ 33.00 |
| Dry Deposition and Etching in a Plasma Environment | Other External User ($/hour) |
External Users from Other Universities and SME |
Internal Projects and |
| DRIE | $ 110.50 | $ 102.00 | $ 93.50 |
| RIE-1 | $ 58.50 | $ 54.00 | $ 49.50 |
| RIE-2 OMEGA i2L APS | $ 84.50 | $ 78.00 | $ 71.50 |
| RIE METAL MPX ICP | $ 84.50 | $ 78.00 | $ 71.50 |
| PECVD-1 | $ 65.00 | $ 60.00 | $ 55.00 |
| PECVD-2 DELTA I2l | $ 78.00 | $ 72.00 | $ 66.00 |
| PARYLENE DEPOSITION SYSTEM PDS 2010 | $ 13.00 | $ 12.00 | $ 11.00 |
| VAPOR HF ETCHER PRIMAXX NGCET | $ 39.00 | $ 36.00 | $ 33.00 |
| ETCHING SYSTEM XeF2 Xenon | $ 20.80 | $ 19.20 | $ 17.60 |
| OXYGEN PLASMA SYSTEM NANOPLAS | $ 19.50 | $ 18.00 | $ 16.50 |
| OXYGEN PLASMA SYSTEM BRANSON | $ 6.50 | $ 6.00 | $ 5.50 |
| Chemical Wet Etching, Cleaning, and Coating | Other External User ($/hour) |
External Users from Other Universities and SME |
Internal Projects and |
| WET BENCH A (Bench-1-2-3-4-5-6-8-9-20) | $ 39.00 | $ 36.00 | $ 33.00 |
| WET BENCH B (Bench 10-11-12-13-14-15-16-17-18-19) | $ 26.00 | $ 24.00 | $ 22.00 |
| WAFER/MASK CLEANER EVG 301 | $ 16.90 | $ 15.60 | $ 14.30 |
| CRITICAL POINT DRYER | $ 13.00 | $ 12.00 | $ 11.00 |
| GRINDER AXUS | $ 23.40 | $ 21.60 | $ 19.80 |
| LAPPING ENGIS | $ 15.60 | $ 14.40 | $ 13.20 |
| SRD- TERRA | $ 10.40 | $ 9.60 | $ 8.80 |
| High-Temperature Oxidation and Diffusion | Other External User ($/hour) |
External Users from Other Universities and SME |
Internal Projects and |
| FURNACE DIFFUSION | $ 32.50 | $ 30.00 | $ 27.50 |
| FURNACE LPCVD | $ 88.40 | $ 81.60 | $ 74.80 |
| FURNACE FRESENBERGER (HIGH TEMP.) | $ 9.10 | $ 8.40 | $ 7.70 |
| FURNACE IMPERIAL IV UltraClean | $ 6.50 | $ 6.00 | $ 5.50 |
| Metrology | Other External User ($/hour) |
External Users from Other Universities and SME |
Internal Projects and |
| OPTICAL SURFACE PROFILER WYKO | $ 13.00 | $ 12.00 | $ 11.00 |
| CONTACT SURFACE PROFILER DEKTAK | $ 13.00 | $ 12.00 | $ 11.00 |
| IR INSPECTION MICROSCOPE IDONUS | $ 13.00 | $ 12.00 | $ 11.00 |
| SEM JEOL-7500 | $ 32.50 | $ 30.00 | $ 27.50 |
| SEM HITACHI | $ 32.50 | $ 30.00 | $ 27.50 |
| MICROSCOPES HIROX | $ 13.00 | $ 12.00 | $ 11.00 |
| MICROSCOPES NIKON | $ 6.50 | $ 6.00 | $ 5.50 |
| Electronic Packaging and Integration | Other External User ($/hour) |
External Users from Other Universities and SME |
Internal Projects and |
| FLIP CHIP BONDER FC150 | $ 32.50 | $ 30.00 | $ 27.50 |
| DICER | $ 20.80 | $ 19.20 | $ 17.60 |
| WIREBONDER Ball DELVOTECH 56XX (10/32) | $ 32.50 | $ 30.00 | $ 27.50 |
| WIREBONDER Wedge DELVOTECH 56XX (30) | $ 32.50 | $ 30.00 | $ 27.50 |
| WAFER BONDER EVG 501 | $ 13.00 | $ 12.00 | $ 11.00 |
| WAFER BONDER EVG 520IS | $ 31.20 | $ 28.80 | $ 26.40 |
| PROJECTION VACUUM WELDER POLARIS ACCUWELD-4270 | $ 6.50 | $ 6.00 | $ 5.50 |
| DIE BONDER TRESKY | $ 9.10 | $ 8.40 | $ 7.70 |
| LASER CUTTER ESI | $ 10.40 | $ 9.60 | $ 8.80 |
| BOND TESTER DAGE4000 | $ 10.40 | $ 9.60 | $ 8.80 |
| PLASMA ACTIVATION SYSTEM EVG 810 | $ 36.40 | $ 33.60 | $ 30.80 |
| ACOUSTIC MICROSCOPE PVA TEPLA | $ 6.50 | $ 6.00 | $ 5.50 |
| Characterization | Other External User ($/hour) |
External Users from Other Universities and SME |
Internal Projects and External Users from METU ($/hour) |
| DIELECTRIC THICKNESS MEASUREMENT SYSTEM NANOMETRICS | $ 6.50 | $ 6.00 | $ 5.50 |
| STRESS MEASUREMENT SYSTEM TOHO FLX 2320 | $ 13.00 | $ 12.00 | $ 11.00 |
| ELLIPSOMETER IR VASE | $ 19.50 | $ 18.00 | $ 16.50 |
| FTIR-F40 | $ 26.00 | $ 24.00 | $ 22.00 |
| Device Testing and Characterization | Other External User ($/hour)) |
External Users from Other Universities and SME |
Internal Projects and External Users from METU ($/hour) |
| Dynamic MEMS Analyzer POLYTEC MSA-500 | $ 19.50 | $ 18.00 | $ 16.50 |
| PROBE STATION PAV 200 | $ 91.00 | $ 84.00 | $ 77.00 |
| PROBE STATION MICROMANIPULATOR | $ 13.00 | $ 12.00 | $ 11.00 |
| PROBE STATION LUCAS SIGNATONE | $ 6.50 | $ 6.00 | $ 5.50 |
| 4-POINT PROBE MAGNE-TRON | $ 6.50 | $ 6.00 | $ 5.50 |
| TCR MEASUREMENT SYSTEM QUADPRO | $ 10.40 | $ 9.60 | $ 8.80 |