Services fees
Last Updated:
SERVICES FEES
In addition to ongoing national and international projects, METU MEMS Center continues to support research and development activities carried out throughout the country by providing its qualified cleanroom infrastructure for the use of external stakeholders within the framework of fundamental principles and rules.
All individuals, institutions, and organizations who want to benefit from the facilities of the Center are defined as "External Users". External Users, who want to buy services from the Center involving the use of the Class 1000 and 10000 (testing area) cleanroom infrastructures, shall fill out the "Quotation Request Form" correctly (under the "Our Services" tab on our website) and submit for evaluation. If the demand of External Users is decided as achievable to be met by using the facilities of the Center, a quotation is prepared based on the "METU MEMS Center - Hourly Fees for Device Use" list given below. Provided that the external user has received the necessary training, they can work in the cleanroom independently, following occupational health and safety rules, under the approval and supervision of the relevant device responsible (i.e. identified owner of the device).
Related to "METU MEMS Center - Hourly Fees for Device Use";
• During the invoicing process, the actual usage is taken into account rather than the prices stated on the quotation.
• The prices listed below do not include the cost of consumables used in the devices.
• The prices listed below do not include VAT.
• The prices listed below are for standard device use only. Pricing may vary depending on additional requests (material use, design of experiment, analysis, and reporting of outputs, etc.) and/or the complexity of the request.
• The 'Hourly Wage' specified in the list is applicable only to standard applications. This price may vary for studies conducted within the scope of special production and R&D.
• The "TA 1000 (i.e., Class 1000 Cleanroom) Single Entry - Consumable Fee" in the list includes consumables such as gloves, masks, shoe covers, and wipers that everyone must use when entering.
• When External Users who use cleanroom infrastructure repeatedly and continuously are considered, fees for materials such as articles of clothing, shoes, etc., are priced once a year within the scope of the service.
• The "Cleanroom Entrance Fee" is charged on a daily basis.
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CLEANROOM (CR) ACCESS & EQUIPMENT HOURLY RATES |
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CR CLASS 1000 ENTRY FEE |
$ 40,00 |
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TEST AREA CLASS 10000 ENTRY FEE |
$ 8,00 |
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BIOMEMS AREA ENTRY FEE |
$ 8,00 |
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STAFF HOURLY RATE |
$ 50,00 |
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LITHOGRAPHY PROCESSES UNIT |
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MANUAL SPIN COATER |
$ 25,00 |
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AUTOMATIC SPIN COATER SUSS MicroTec ACS 200 |
$ 170,00 |
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STEPPER ASML PAS5500 |
$ 232,00 |
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MASK MAKER |
$ 100,00 |
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MASK ALIGNER |
$ 45,00 |
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METALLIZATION PROCESSES UNIT |
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SPUTTER BESTEC |
$ 120,00 |
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SPUTTER AJA |
$ 115,00 |
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SPUTTER NANOVAK |
$ 30,00 |
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THERMAL EVAPORATOR VARIAN |
$ 60,00 |
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DRY DEPOSITION & ETCH PROCESSES IN PLASMA ENVIRONMENT UNIT |
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DRIE |
$ 150,00 |
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RIE-1 |
$ 90,00 |
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RIE-2 Omega i2L APS |
$ 130,00 |
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RIE Metal MPX ICP |
$ 130,00 |
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STS PECVD-1 |
$ 90,00 |
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STS PECVD-2 DELTA İ2l |
$ 120,00 |
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PARYLENE DEPOSITION SYSTEM PDS 2010 |
$ 20,00 |
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VAPOR HF ETCHER PRIMAXX NGCET |
$ 60,00 |
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ETCHING SYSTEM XeF2 Xenon |
$ 32,00 |
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OXYGEN PLASMA SYSTEM NANOPLAS |
$ 30,00 |
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OXYGEN PLASMA SYSTEM BRANSON |
$ 10,00 |
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WET ETCH & COATING PROCESSES UNIT |
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WET BENCH TERRA (Bench-1-2-3-4-5-6-8-9-20) |
$ 50,00 |
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WET BENCH TESTAŞ (Bench 10-11-12-13-14-15-16-17-18-19) |
$ 40,00 |
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WAFER/MASK CLEANER EVG 301 |
$ 26,00 |
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CRITICAL POINT DRYER |
$ 20,00 |
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WAFER CLEANER AXUS |
$ 48,00 |
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GRINDER AXUS |
$ 36,00 |
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LAPPING ENGIS |
$ 25,00 |
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SRD- TERRA |
$ 16,00 |
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HIGH-TEMPERATURE COATING & FURNACE PROCESSES UNIT |
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FURNACE DIFFUSION |
$ 50,00 |
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FURNACE LPCVD |
$ 138,00 |
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FURNACE FRESENBERGER (HIGH TEMP.) |
$ 15,00 |
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FURNACE IMPERIAL IV UltraClean |
$ 10,00 |
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METROLOGY PROCESSES UNIT |
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OPTICAL SURFACE PROFILER WYKO |
$ 20,00 |
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CONTACT SURFACE PROFILER DEKTAK |
$ 20,00 |
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IR INSPECTION MICROSCOPE IDONUS |
$ 20,00 |
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SEM JEOL-7500 |
$ 50,00 |
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SEM HITACHI |
$ 50,00 |
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MICROSCOPES HIROX |
$ 20,00 |
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ELECTRONIC PACKAGING & INTEGRATION PROCESSES UNIT |
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DICER |
$ 32,00 |
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WIREBONDER Ball DELVOTECH 56XX (10/32) |
$ 50,00 |
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WIREBONDER Wedge DELVOTECH 56XX (30) |
$ 50,00 |
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WAFER BONDER EVG 501 |
$ 20,00 |
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WAFER BONDER EVG 520IS |
$ 48,00 |
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PROJECTION VACUUM WELDER POLARIS ACCUWELD-4270 |
$ 10,00 |
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DIE BONDER/REOWEN TRESKY |
$ 15,00 |
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LASER CUTTER |
$ 16,00 |
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BOND TESTER DAGE4000 |
$ 16,00 |
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PLASMA ACTIVATION SYSTEM EVG 810 |
$ 56,00 |
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Acoustic Microscope (PVA TePla / SAM 310 HD2) |
$ 10,00 |
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MEASUREMENT & CHARACTERIZATION PROCESSES UNIT |
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DIELECTRIC THICKNESS MEASUREMENT SYSTEM NANOMETRICS |
$ 10,00 |
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STRESS MEASUREMENT SYSTEM TOHO FLX 2320 |
$ 20,00 |
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ELLIPSOMETER IR VASE |
$ 30,00 |
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FTIR-F40 |
$ 40,00 |
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MS-SENSOR CHARACTERIZATION SETUP (BLACKBODY SYSTEMS) |
$ 15,00 |
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MS-RESPONSIVITY SETUP |
$ 16,00 |
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SLA 3D PRINTER |
$ 22,00 |
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SOFT EMBOSSING |
$ 10,00 |
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DEVICE TEST & CHARACTERIZATION PROCESSES UNIT |
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DYNAMIC MEMS ANALYZER POLYTEC MSA-500 |
$ 30,00 |
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PROBE STATION PAV 200 |
$ 140,00 |
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PROBE STATION MICROMANIPULATOR |
$ 20,00 |
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PROBE STATION LUCAS SIGNATONE |
$ 10,00 |
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4-POINT PROBE MAGNE-TRON |
$ 10,00 |
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TCR MEASUREMENT SYSTEM QUADPRO |
$ 16,00 |
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CELL CULTURE & BioMEMS AREA |
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PHASE CONTRAST MICROSCOPE (Inverted Fluorescent Mic.) & MICROFLUIDIC FLOW CONTROL SYSTEM (Microfluidic Flow Controller) |
$ 17,00 |
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MICROFLUIDIC FLOW CONTROL SYSTEM (Microfluidic Flow Controller) |
$ 15,00 |
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POTENTIOSTAT/GALVANOSTAT SYSTEM MODULAR AUTOLAB PGSTAT 128N |
$ 10,00 |
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MICROPLATE READER THERMO SKY |
$ 10,00 |
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OXYGEN/ARGON PLASMA SYSTEM (DIENER ATTO) |
$ 15,00 |
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CELL CULTURE LABORATORY |
$ 20,00 |
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BIOCHEMISTRY LABORATORY |
$ 20,00 |