In the RF MEMS research area, where our Center has been operating since 2002, we have conducted research, development, and production activities for MEMS sensors and RF devices. These activities align with the priority targets of our country in the millimeter (mm) and terahertz (THz) bands of the electromagnetic spectrum. In this context, we have developed devices such as RF MEMS switches, antennas (including reflective surfaces and phased arrays), phase shifters, and capacitors. Additionally, we have expanded our capabilities in this field by initiating work in the terahertz (THz) frequency band of the electromagnetic spectrum, which is a relatively recent discovery worldwide.